In this paper, the growth, structural and optical properties of the hexagonal ZnO nano-structures grown by Ultrasonic Spray Chemical Vapor Deposition (USCVD) method at atmospheric pressure have been investigated. The characterizations of the grown thin films have been made with X-ray diffraction (XRD), Atomic Force Microscopy (AFM) and UV-vis Spectrophotometry measurements. Different samples have been grown on the soda-lime glass substrate with different power values of the ultrasonic transducer. Although the hexagonal ZnO nanostructures have been expected to show the polycrystalline structures, they have a strong the x-ray diffraction peaks in (0002) direction. The optical band gap, the grain size and the surface roughness of the hexagonal ZnO nanostructures have been determined. It is shown that, with the increasing power usage of the transducer, the optical transmittance of hexagonal ZnO nanostructures has decreased in the visible area. The optimum power usage of transducer used in USCVD method has been determined for the further studies. (C) 2018 Elsevier GmbH. All rights reserved.