13th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2023, Paris, France, 18 - 21 July 2023, pp.1427-1428, (Full Text)
In this paper, we present the Nano-Electro-Mechanical Systems (NEMS)-Based phase shifter using the Terahertz Subwavelength Confinement Waveguides (TSCW). The 90° phase difference is obtained from the OFF- and ON-states of the NEMS-based phase shifter at 0.29 THz. The measurement results of the 90° phase shifter show -4.79 dB worst-case insertion loss for the TSCW with 630 um total length, which indicates the performances of 7.60 dB/mm and 18.8 °/dB.