A Planar, NEMS-Based Terahertz Phase Shifter Using Subwavelength Confinement Waveguides
13th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2023, Paris, Fransa, 18 - 21 Temmuz 2023, ss.1427-1428, (Tam Metin Bildiri)
- Yayın Türü: Bildiri / Tam Metin Bildiri
- Basıldığı Şehir: Paris
- Basıldığı Ülke: Fransa
- Sayfa Sayıları: ss.1427-1428
- Ankara Yıldırım Beyazıt Üniversitesi Adresli: Evet
Özet
In this paper, we present the Nano-Electro-Mechanical Systems (NEMS)-Based phase shifter using the Terahertz Subwavelength Confinement Waveguides (TSCW). The 90° phase difference is obtained from the OFF- and ON-states of the NEMS-based phase shifter at 0.29 THz. The measurement results of the 90° phase shifter show -4.79 dB worst-case insertion loss for the TSCW with 630 um total length, which indicates the performances of 7.60 dB/mm and 18.8 °/dB.