Research Information System
2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014, South Carolina, United States Of America, 8 - 12 June 2014, pp.307-310, (Full Text)
This paper reports a multifunctional cantilever capable of self-heating and Lorentz force actuation for nanomechanical measurements over a large temperature range. The novel electrical design of the cantilever allows for high current to flow through the cantilever, resulting in high Lorentz force. The cantilever can self-heat beyond 800 °C, and the heating is mostly independent of actuation force. When operated at its resonance frequency of 102 kHz, the cantilever generates more than 5.3 µN of Lorentz force while self-heating only to 44 °C. This cantilever can generate about 7X larger Lorentz force than other heated cantilevers. The cantilever can be operated in air or water.