Multifunctional atomic force microscope cantilever with lorentz force actuation and self-heating for nanomechanical measurements in air and water
2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014, South Carolina, Amerika Birleşik Devletleri, 8 - 12 Haziran 2014, ss.307-310, (Tam Metin Bildiri)
- Yayın Türü: Bildiri / Tam Metin Bildiri
- Doi Numarası: 10.31438/trf.hh2014.83
- Basıldığı Şehir: South Carolina
- Basıldığı Ülke: Amerika Birleşik Devletleri
- Sayfa Sayıları: ss.307-310
- Açık Arşiv Koleksiyonu: AVESİS Açık Erişim Koleksiyonu
- Ankara Yıldırım Beyazıt Üniversitesi Adresli: Hayır
Özet
This paper reports a multifunctional cantilever capable of self-heating and Lorentz force actuation for nanomechanical measurements over a large temperature range. The novel electrical design of the cantilever allows for high current to flow through the cantilever, resulting in high Lorentz force. The cantilever can self-heat beyond 800 °C, and the heating is mostly independent of actuation force. When operated at its resonance frequency of 102 kHz, the cantilever generates more than 5.3 µN of Lorentz force while self-heating only to 44 °C. This cantilever can generate about 7X larger Lorentz force than other heated cantilevers. The cantilever can be operated in air or water.