© 2020 Elsevier B.V.ZnO nanostructures were grown using Ultrasonic Spray Chemical Vapor Deposition (USCVD) on different soda-lime substrates. XRD (X-ray diffraction), AFM (Atomic Force Microscope) and UV-visible spectroscopy measurements of all the samples have been carried out. The samples are shown a polycrystalline characteristic with the hexagonal ZnO structure. The peak of (0 0 2) growing direction has become stronger after annealing of samples under Ar and O2 atmospheres. It is shown that the annealing and annealing atmospheres have a substantial effect on optical and structural properties of the grown samples on different substrates.