Contact Force Calculation of an Electrically Actuated Micro Cantilever Beam Switch
1st International Conference on Advances in Mechanical and Mechatronics Engineering ICAMMEN 2018, Ankara, Turkey, 8 - 09 November 2018, pp.464-469, (Full Text)
- Publication Type: Conference Paper / Full Text
- City: Ankara
- Country: Turkey
- Page Numbers: pp.464-469
- Ankara Yıldırım Beyazıt University Affiliated: Yes
Abstract
Minimizing the sizes is quite important since micro structures are being used more and more with the developing science. RF MEMS switches are one of those that main duty is to transmit the signal and the most important effect on signal quality is the contact force which occurs between the contact surfaces. In order to investigate the contact force concept, a relatively smaller metal to metal contact, cantilever beam type micro switch is designed. A rectangular hole is used in design to reduce the stiffness. Because of the physical modelling of the system, a statically indeterminate problem is needed to be solved. Moment-area method is used to solve this complexity and it is demonstrated with some graphics. FEM simulation is utilized to compare the results. Moment-area method showed very good performance therefore, this study may give primitive idea to designers about the behavior of micro cantilevers under electrical actuation and help them to analyze the contact force.