Research Information System
Materials Science in Semiconductor Processing, vol.14, no.1, pp.28-36, 2011 (SCI-Expanded)
ZnS thin film has been grown on n-Si substrate for obtaining Zn/ZnS/n-Si/Au-Sb sandwich structure by using the Successive Ionic Layer Adsorption and Reaction (SILAR) method. For structural properties, the XRD and SEM measurements have been done and it is seen that films exhibit polycrystalline behavior. The energy band gap value of ZnS thin film grown glass substrate has been found as 3.77 eV from the absorption measurements. The sandwich structure has demonstrated clearly rectifying behavior by the currentvoltage (IV) curves at room temperature Thermal annealing effect on the structural, optical and electrical properties has been investigated. From IV characteristics n, Φb and mean Rs values have been calculated as 2.60, 0.71 eV and 3.8 kΩ at room temperature respectively. For annealed films at 400 °C, these values have been found as 1.68, 0.62 eV and 1.5 kΩ, respectively. From CV characteristics, carrier concentration, Fermi energy and barrier height values of this structure were calculated as a function of annealing temperature. © 2010 Elsevier Ltd. All rights reserved.