© 2021 Elsevier B.V.In this study, ZnO nanoplatelets (NPs) grown on the SiO2 layer using mist chemical vapor deposition (mist-CVD) growth method were investigated for different growth temperatures. Structural and surface properties of the grown ZnO NPs have been characterized by x-ray diffraction (XRD), atomic force microscopy (AFM), and scanning electron microscopy (SEM) measurements. ZnO NPs have preferred to grow in the [101‾2] and [112‾0] growing directions with two-dimensional (2D) nanosheet like behavior. Furthermore, it is observed from XRD results that possible beta phase willemite (Zn2SiO4) structure has been grown for the first time using mist-CVD method. It is shown that the higher growth temperature is decreasing the growth rate of ZnO NPs on the substrate where the Leidenfrost effect is seemed to occur. The characteristic vibration modes related to wurtzite ZnO have been shown together with confocal Raman spectroscopy measurement.