Repetitive control of an electrostatic microbridge actuator
2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005, Orlando, United States Of America, 5 - 11 November 2005, vol.118 A, pp.453-460, (Full Text)
- Publication Type: Conference Paper / Full Text
- Volume: 118 A
- Doi Number: 10.1115/imece2005-80019
- City: Orlando
- Country: United States Of America
- Page Numbers: pp.453-460
- Ankara Yıldırım Beyazıt University Affiliated: No
Abstract
Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is difficult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge. Squeeze film damping ensures boundedness of the distributed transverse displacement. Offline processing using repetitive control algorithm updates a waveform generator's parameters based on measured response to reduce errors between the desired and actual displacement distribution. Simulations show a 36% reduction in midspan overshoot. Copyright © 2005 by ASME.