Repetitive control of an electrostatic microbridge actuator
2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005, Orlando, Amerika Birleşik Devletleri, 5 - 11 Kasım 2005, cilt.118 A, ss.453-460, (Tam Metin Bildiri)
- Yayın Türü: Bildiri / Tam Metin Bildiri
- Cilt numarası: 118 A
- Doi Numarası: 10.1115/imece2005-80019
- Basıldığı Şehir: Orlando
- Basıldığı Ülke: Amerika Birleşik Devletleri
- Sayfa Sayıları: ss.453-460
- Ankara Yıldırım Beyazıt Üniversitesi Adresli: Hayır
Özet
Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is difficult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge. Squeeze film damping ensures boundedness of the distributed transverse displacement. Offline processing using repetitive control algorithm updates a waveform generator's parameters based on measured response to reduce errors between the desired and actual displacement distribution. Simulations show a 36% reduction in midspan overshoot. Copyright © 2005 by ASME.