Design and Modeling Interdigitated Capacitor - Spiral Inductor Resonator for Optical Pressure Sensor

Demirel M., Duyguluer G., Öztürk M., Salmanogli A., Gecim H.

13th International Conference on Electrical and Electronics Engineering, ELECO 2021, Virtual, Bursa, Turkey, 25 - 27 November 2021, pp.195-200 identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.23919/eleco54474.2021.9677710
  • City: Virtual, Bursa
  • Country: Turkey
  • Page Numbers: pp.195-200
  • Keywords: interdigitated capacitor, LC resonator, optical pressure sensor, spiral inductor
  • Ankara Yıldırım Beyazıt University Affiliated: No

Abstract

In this study, an optical pressure sensor is designed to sense a force. To achieve that, an interdigitated capacitor connected to a spiral inductor that oscillates at GHz region is proposed to be designed. To sense a force with very low amplitude, some different materials are applied as a dielectric material between the layers of the interdigitated capacitor. Thus, by applying the force, the circuit's capacitance is changed due to the displacement of the selected dielectric. This leads to change of the circuit's scattering parameters which lets to sense the lowest scale of the pressure possible. For simulation, the circuit is designed in COMSOL, theoretically studied the scattering parameters and the effect of the force on the circuit characteristic and finally, Advanced Design System is used to optimize the parameters for this specific aim.